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Microsystems Technology: Design and Microfabrication - ELEC9505
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Faculty: Faculty of Engineering
 
 
School:  School of Electrical Eng and Telecommunications
 
 
Course Outline: http://www.ee.unsw.edu.au/
 
 
Campus: Kensington Campus
 
 
Career: Postgraduate
 
 
Units of Credit: 6
 
 
EFTSL: 0.12500 (more info)
 
 
Indicative Contact Hours per Week: 3
 
 
Enrolment Requirements:
 
 
None
 
 
Equivalent: ELEC8505
 
 
Excluded: ELEC8505, ELEC9703
 
 
Fee Band: 2 (more info)
 
 
Further Information: See Class Timetable
 
 

Description

Interdisciplinary overview of MST (MicroElectroMechanical Systems - MEMS). Transducer definition: Sensors and Actuators. Micromachining techniques including silicon bulk micromachining, silicon surface micromachining, stiction problems, bonding processes, LIGA technique, micromachined mould template and electroplating, sealed cavity formation, stereolithography, chemical mechanical polishing for planarisation, electric discharge micromachining, laser micromachining, focused ion beam micromachining. Properties of materials for micromachining. Mechanical transducers. Optical transducers.Thermal transducers. Magnetic transducers. Chemical and biological transducers. Microfluidic devices. Circuit interfaces to transducers. System considerations. Case studies. Technology trends.

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© The University of New South Wales (CRICOS Provider No.: 00098G), 2004-2011. The information contained in this Handbook is indicative only. While every effort is made to keep this information up-to-date, the University reserves the right to discontinue or vary arrangements, programs and courses at any time without notice and at its discretion. While the University will try to avoid or minimise any inconvenience, changes may also be made to programs, courses and staff after enrolment. The University may also set limits on the number of students in a course.