This course introduces the fundamentals of Micro Electromechanical systems (MEMS). MEMS is an enabling technology which has been penetrated into and begun to change the way major discipline do things, including biotechnology, storage technology, instrumentation, optical communications, telecommunications, MEMS device packaging, etc.

This course provides an interdisciplinary overview of MEMS including the micro machining and fabrication technology, electromagnetic, thermal actuation, microfluidic basics and devices, BioMEMS and etc. Students will have an hand on experience in modelling and designing of MEMS devices through group projects.