Introduction to Micro Electromechanical Systems - MECH9650

Faculty: Faculty of Engineering

School: School of Mechanical and Manufacturing Engineering

Course Outline:

Campus: Sydney

Career: Undergraduate

Units of Credit: 6

EFTSL: 0.12500 (more info)

Indicative Contact Hours per Week: 3

CSS Contribution Charge: 2 (more info)

Tuition Fee: See Tuition Fee Schedule

Further Information: See Class Timetable

View course information for previous years.


This course introduces the fundamentals of Micro Electromechanical systems (MEMS). MEMS is an enabling technology which has been penetrated into and begun to change the way major discipline do things, including biotechnology, storage technology, instrumentation, optical communications, telecommunications, MEMS device packaging, etc.

This course provides an interdisciplinary overview of MEMS including the micro machining and fabrication technology, electromagnetic, thermal actuation, microfluidic basics and devices, BioMEMS and etc. Students will have an hand on experience in modelling and designing of MEMS devices through group projects.


Study Levels

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