Microsystems Design and Technology - ELEC9703

Faculty: Faculty of Engineering

School: School of Electrical Eng and Telecommunications

Course Outline:

Campus: Sydney

Career: Postgraduate

Units of Credit: 6

EFTSL: 0.12500 (more info)

Indicative Contact Hours per Week: 3

Excluded: ELEC8505, ELEC9505

CSS Contribution Charge: 2 (more info)

Tuition Fee: See Tuition Fee Schedule

Further Information: See Class Timetable

View course information for previous years.


Interdisciplinary overview of MST (MicroElectroMechanical Systems - MEMS). Transducer definition: Sensors and Actuators. Micromachining techniques including silicon bulk micromachining, silicon surface micromachining, stiction problems, bonding processes, LIGA technique, micromachined mould template and electroplating, sealed cavity formation, stereolithography, chemical mechanical polishing for planarisation, electric discharge micromachining, laser micromachining, focused ion beam micromachining. Properties of materials for micromachining. Mechanical transducers. Optical transducers.Thermal transducers. Magnetic transducers. Chemical and biological transducers. Microfluidic devices. Circuit interfaces to transducers. System considerations. Case studies. Technology trends.


Study Levels

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