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VLSI Technology - ELEC9704
ELEC9704

 
Faculty: Faculty of Engineering
 
 
School:  School of Electrical Eng and Telecommunications
 
 
Course Outline: http://www.ee.unsw.edu.au
 
 
Campus: Kensington Campus
 
 
Career: Postgraduate
 
 
Units of Credit: 6
 
 
EFTSL: 0.12500 (more info)
 
 
Indicative Contact Hours per Week: 3
 
 
Excluded: ELEC9502
 
 
Fee Band: 2 (more info)
 
 
Further Information: See Class Timetable
 
 

Description

UOC6 HPW3
Introduction to silicon VLSI technology. Future trends in VLSI technology. Technology limitations. Basic technology modules include: crystal growth and wafer preparation; mask generation techniques; lithography; diffusion process; ion implantation; oxidation; etching techniques - wet etching and plasma etching; thin film deposition - epitaxial growth, chemical vapor deposition techniques, metallisation; clean room technology; Advanced process integration for CMOS, BiCMOS and Bipolar fabrication; Failure analysis techniques.

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