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Microsystems Design and Technology - ELEC9703
ELEC9703

 
Faculty: Faculty of Engineering
 
 
School:  School of Electrical Eng and Telecommunications
 
 
Course Outline: http://www.ee.unsw.edu.au
 
 
Campus: Kensington Campus
 
 
Career: Postgraduate
 
 
Units of Credit: 6
 
 
EFTSL: 0.12500 (more info)
 
 
Indicative Contact Hours per Week: 3
 
 
Excluded: ELEC8505, ELEC9505
 
 
Fee Band: 2 (more info)
 
 
Further Information: See Class Timetable
 
 

Description

UOC6 HPW3
Interdisciplinary overview of MST (MicroElectroMechanical Systems - MEMS). Transducer definition: Sensors and Actuators. Micromachining techniques including silicon bulk micromachining, silicon surface micromachining, stiction problems, bonding processes, LIGA technique, micromachined mould template and electroplating, sealed cavity formation, stereolithography, chemical mechanical polishing for planarisation, electric discharge micromachining, laser micromachining, focused ion beam micromachining. Properties of materials for micromachining. Mechanical transducers. Optical transducers.Thermal transducers. Magnetic transducers. Chemical and biological transducers. Microfluidic devices. Circuit interfaces to transducers. System considerations. Case studies. Technology trends.

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