UNSW Handbook Course - VLSI Technology

VLSI Technology - ELEC9502


	Faculty: Faculty of Engineering
	School: School of Electrical Eng and Telecommunications
	Course Outline: http://www.ee.unsw.edu.au/
	Campus: Kensington Campus
	Career: Postgraduate
	Units of Credit: 6
	EFTSL: 0.125 (more info)
	Contact Hours per Week: 3
	Fee Band: 2 (more info)
	Further Information: See Class Timetable

Description

Introduction to silicon VLSI technology. Future trends in VLSI technology. Technology limitations. Basic technology modules include: crystal growth and wafer preparation; mask generation techniques; lithography; diffusion process; ion implantation; oxidation; etching techniques - wet etching and plasma etching; thin film deposition - epitaxial growth, chemical vapor deposition techniques, metallisation; clean room technology; Advanced process integration for CMOS, BiCMOS and Bipolar fabrication; Failure analysis techniques.

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