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 VLSI Technology - ELEC9502
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Campus: Kensington Campus
 
 
Career: Postgraduate
 
 
Units of Credit: 6
 
 
EFTSL: 0.125 (more info)
 
 
Contact Hours per Week: 3
 
 
Fee Band: 2 (more info)
 
 
Further Information: See Class Timetable
 
  

Description

Introduction to silicon VLSI technology. Future trends in VLSI technology. Technology limitations. Basic technology modules include: crystal growth and wafer preparation; mask generation techniques; lithography; diffusion process; ion implantation; oxidation; etching techniques - wet etching and plasma etching; thin film deposition - epitaxial growth, chemical vapor deposition techniques, metallisation; clean room technology; Advanced process integration for CMOS, BiCMOS and Bipolar fabrication; Failure analysis techniques.

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